Diaphragm valve with welded diaphragm seat carrier

ABSTRACT

A diaphragm valve with an assembly or cartridge that facilitates replacement of the diaphragm, the valve seat or both. The assembly may be a valve assembly having a diaphragm, a seat carrier and a valve seat that are combined into a discrete subassembly or cartridge for a diaphragm valve. The assembly as a discrete cartridge can be easily removed and replaced in order to change out the diaphragm or the valve seat or both. In one embodiment, the diaphragm has a perimeter that is welded to one side of the seat carrier. Flow capacity is favored by providing a gap between a seat carrier and a flow port of the valve body where the gap in part defines a flow area that is the same or greater than the flow area of the flow port. Methods for installing and replacing a valve assembly into a valve body are also disclosed.

RELATED APPLICATION

This application claims the benefit of U.S. provisional patentapplication No. 61/759,705 for DIAPHRAGM VALVE WITH WELDED DIAPHRAGMSEAT CARRIER, filed on Feb. 1, 2013, the entire disclosure of which isfully incorporated herein by reference.

TECHNICAL FIELD

The disclosure relates generally to valves and more particularly todiaphragm valves.

BACKGROUND OF THE DISCLOSURE

Valves are commonly used to control fluid flow. Diaphragm valves are anexample of a flow control valve that are used in many industries tocontrol the flow of gas, liquid and other fluids. Basic diaphragm valvesoperate to close off flow by moving a diaphragm into contact with avalve seat. The diaphragm and valve seat may be wear items that need tobe occasionally replaced during the service life of the valve.

SUMMARY OF THE DISCLOSURE

A first inventive concept presented herein provides a diaphragm valvewith an assembly or cartridge that facilitates replacement of thediaphragm, the valve seat or both. In an embodiment, the assembly may bea valve assembly having a diaphragm, a seat carrier and a valve seatthat are combined to provide a discrete subassembly or cartridge for adiaphragm valve. The assembly as a discrete cartridge can be easilyremoved and replaced in order to change out the diaphragm or the valveseat or both. In an alternative embodiment, the assembly may be a valveassembly having a diaphragm, a seat carrier and a valve seat, with thevalve seat being retained with the seat carrier and the diaphragm beingwelded to the seat carrier.

Another inventive concept presented herein provides a valve assemblyhaving a valve seat, a seat carrier and a diaphragm, the valve seatbeing retained with the seat carrier and the diaphragm being attached tothe seat carrier by a weld.

In another embodiment, a valve assembly includes a valve seat, a seatcarrier and a diaphragm, the valve seat being retained on a first sideof the seat carrier and the diaphragm being attached to another side ofthe seat carrier by a weld.

Another inventive concept contemplates methods of installing andreplacing a diaphragm or valve seat or both for a diaphragm valve. In anembodiment, a method for installing includes forming a valve assembly bycombining a valve seat, a seat carrier and a diaphragm valve by weldingthe diaphragm to one side of the seat carrier, and installing the valveassembly into a valve body. An embodiment of a method for replacing mayinclude the same steps as the method for installing, and the step ofremoving from a valve body a prior used valve assembly and replacing theprior used valve assembly with a replacement valve assembly

These and other inventive concepts and additional aspects and advantagesof the various embodiments set forth herein will be readily understoodand appreciated by those skilled in the art from the following detaileddescription and the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a diaphragm valve and actuator assembly inlongitudinal cross-section and in accordance with the teachings herein,

FIG. 2 is an enlarged view of the circled portion of FIG. 1,

FIG. 3 is an enlarged view of the circled portion of FIG. 2,

FIG. 4 is a plan view of an exemplary seat carrier used in theembodiment of FIG. 1,

FIG. 5 illustrates a manifold for two or more diaphragm valve andactuator assemblies, shown in exploded perspective and partialcross-section.

DESCRIPTION OF THE EXEMPLARY EMBODIMENTS

Diaphragm valves are used as flow control devices for gas and liquidfluids. In the semiconductor industry, for example, process system gasesare controlled using diaphragm valves. A diaphragm valve may beinstalled into a process system in many different ways, including beingmounted on manifolds or substrates that use surface mount technology. Inorder to reduce the footprint of tools that use such valves, diaphragmvalves are being designed to be contained within ever smaller valvebodies. The present inventions may be used, for example, to realize anexemplary valve that fits within a 20 millimeter footprint (400 squaremillimeters) on a surface mount manifold, while still achieving arelatively high flow capacity of about 0.2 Cv, for example. Presentstate of the art is a footprint of about 28.5 mm (812 squaremillimeters). The present inventions also provide for a valve that caneasily be refurbished; wherein important wear components such as thediaphragm and valve seat are combined into a subassembly or cartridgethat can be conveniently removed and replaced either at themanufacturing site or in the field.

With reference to FIGS. 1 and 2, in an embodiment, a diaphragm valve andactuator assembly 10 includes a diaphragm valve 12 and an actuator 14.The diaphragm valve 12 may be configured for assembly onto a substrateor manifold 16. The manifold 16 may include additional mounting sitesfor additional valves or other components (see FIG. 5). Alternatively,the diaphragm valve and actuator assembly 10 may be a standaloneassembly that uses a surface mount configuration on a substrate. But, asurface mount configuration or a manifold configuration are notrequired, and alternatively the diaphragm valve 12 may be installed intoother flow control systems with appropriate porting as needed.

The actuator 14 in this case may be a pneumatic actuator in whichpressurized gas forces one or more actuator pistons 18 axially to movean actuator stem 20. The actuator stem 20 optionally contacts a button22 that contacts the non-wetted side or surface 24 of a diaphragm 26(FIG. 2). Pressurized gas may be provided to an air inlet 28 of theactuator 14 in a known manner. The actuator 14 forms no part of thepresent disclosure other than as an exemplary means to open and closethe diaphragm valve 12. Many different actuator designs andconfigurations may be used as needed. For surface mount configurations,the actuator 14 typically is positioned or stacked on top of thediaphragm valve 12 as shown in the exemplary embodiment herein. Valvesas taught herein may alternatively be used with manual actuators.

The diaphragm valve 12 includes a valve body 30. The valve body 30 maybe a standalone component, but in the exemplary embodiment herein thevalve body 30 may be formed as part of the substrate 16. The valve body30 includes a valve cavity 32 that is defined by a surface, for examplea recessed surface or trepan 34 and a right cylindrical wall 35 (FIG.3). A first port 36 and a second port 38 may be provided in the recessedsurface 34. A valve seat 40 surrounds the first port 36 which preferablybut not necessarily is disposed in the center of the recessed surface34. When the diaphragm 26 is moved into sealing contact with the valveseat 40 by operation of the actuator 14, the diaphragm valve 12 is in aclosed position, and when the diaphragm 26 moves out of contact from thevalve seat 40 the diaphragm valve 12 is in an open position. Flow may befrom the first port 36 serving as an inlet port to the second port 38serving as an outlet port, however, flow direction may also be reversed.

Movement of the diaphragm 26 is controlled by operation of the actuator14 that in response to pressurized gas moves the actuator stem 20 andthe optional button 22 toward and away from the diaphragm 26 so as toclose and open the diaphragm valve 12. To close the diaphragm valve 12,the actuator stem 20 deflects the diaphragm 26 into contact with thevalve seat 40 such that fluid flow between the first port 36 and thesecond port 38 is blocked. To open the diaphragm valve 12, the actuatorstem 20 moves away from the diaphragm 26 which allows the diaphragm 26to move out of sealing contact with the valve seat 40 such that fluidflow between the first port 36 and the second port 38 is permitted. Thediaphragm 26 may be a domed diaphragm that in its natural state willreturn to a position that is away from the valve seat 40. The diaphragmmay be a single piece metal diaphragm or alternatively may be made ofmultiple layers of metal. The first and second ports 36, 38 may act asan inlet or outlet port respectively or vice-versa as needed.

In accordance with an embodiment of another of the inventive concepts ofthe present disclosure, the diaphragm 26 and the valve seat 40 arecombined as a discrete valve assembly 42. As an example, the valveassembly 42 may be utilized as a replaceable valve subassembly orcartridge for a diaphragm valve. In another embodiment and withreference to FIGS. 2, 3 and 4, an annular seat carrier 44 may be adisk-like part having an outer rim 46. The outer rim 46 is of sufficientdiameter so as to encircle the first port 36 and the second port 38. Theouter rim 46 presents a first surface 48 that forms a compressed bodyseal in the form of a face seal against the recessed surface 34. Theouter rim 46 presents a second surface 50 that faces opposite the firstsurface 48. The diaphragm 26 includes a peripheral edge portion 52 thatmay be welded as along a weld W to the second surface 50 of the outerrim 46. A suitable known welding process is high travel speed laserwelding to name one example. The compressed body seal allows the valveassembly 42 to be removed easily and installed easily with the diaphragmvalve 12.

The seat carrier 44 further includes a web 54 that extends radiallyinwardly from the outer rim 46. The web 54 is provided with a centralopening or hole 56. Preferably but not necessarily the web 54 isgenerally planar or flat and may have a thickness that is less than theaxial height of the outer rim 46. When the valve assembly 42 isinstalled in the valve cavity 32, the central opening 56 preferablyaligns coaxially with the first port 36. For reference purposes, axialrefers to the longitudinal axis X of the valve seat 40 as represented inFIGS. 2 and 3.

The valve seat 40 is supported by the web 54 to be in a position that ispreferably coaxial with the first port 36. The valve seat 40 may includean annular seat body 58 with a central flow passage 60 therethrough. Thecentral flow passage 60 may be preferably aligned with the axis X. Thevalve seat body 58 may be shaped generally as a cylinder or ring with alower end flange 62 at one end of the valve seat body 58. The valve seatbody 58 may have a circumferential wall 64 that extends axially from theflange 62 and has a diameter sized to be received closely in and extendthrough the central opening 56 in the web 54. Preferably, the seat bodycircumferential wall 64 is cylindrical as is the wall that defines thecentral opening 56 so that an interference fit may be used to retain thevalve seat 40 with the seat carrier 44. Alternatively, an upper portionof the valve seat 40 may include a radially extending outward lip (notshown) that snaps through the central opening of the web 54 to moreloosely retain the valve seat 40 with the seat carrier 44. The flange 62has a circumferential wall 66 with a diameter that is greater than thediameter of the central opening 56 of the web 54. The web 54 preferablyhas a thickness 68 (FIG. 3) which allows the web 54 to be flexible. Thisflexible web allows the valve seat 40 to be snapped or pushed intoposition so as to be supported by the seat carrier 44. The valve seat 40includes an upper surface 40 a that presents a seal surface againstwhich a wetted surface 26 a of the diaphragm 26 is pressed by operationof the actuator 14 in order to close the valve 12.

The lower surface 70 of the flange 62 will contact and seal against therecessed surface 34 of the valve body when the seat carrier 44 isinstalled in the valve 12. Preferably an upper surface 72 of the flange62 contacts a lower surface 74 of the web 54. The thickness or axiallength of the flange 62 along with the gap (98) may be selected so thatthere is an interference fit (represented by the overlap 76 in FIG. 3)between the web 54 lower surface 74 and the flange upper surface 72 whenthe valve assembly is fully installed into the valve cavity 32. Becausethe web 54 has some flexibility, the web 54 will deflect upward with aspring-like action so as to apply a downward bias against the flange 62to help hold the valve seat 40 in place against the recessed surface 34to form a seat seal when the diaphragm 26 is in the valve open position.When the valve is closed, the actuator applied force presses thediaphragm against the valve seat upper surface 40 a and produces a seatseal between the lower surface 70 of the flange and the recessed surface34 of the valve body.

As noted, the bias of the web 54 against the valve seat flange 62 helpsmaintain a seat seal between the lower surface 70 of the flange and therecessed surface 34 of the valve body when the valve is in an openposition. The bias may be realized in an embodiment by preferablydesigning the seat carrier 44 having a flexible web 54 to flex in aspring-like manner. When the seat carrier 44 is installed into the valvecavity 32 and clamped into position (described below), the axialinterference between the flange 60 of the seat carrier 44 and thecontacting lower surface 74 of the web 54 will cause the web 54 todeflect or displace upward slightly (this displacement may be only a fewthousandths of an inch and is too small to discern at the scale of thedrawings herein). This deflection is due in part to the web beinganchored or fixed at its outer periphery to the outer rim 46, andpreferably is an elastic deflection so that the web 54 applies a biasforce against the valve seat 40 to maintain a seat seal against therecessed surface 34 when the valve is in an open position. This bias canserve as a live or dynamic load to accommodate relative thermalexpansion and material deformation characteristics, for example, of thevalve seat 40 (e.g. polymer material), the diaphragm 26 and the seatcarrier 44 (the latter two which may be metal and not necessarily thesame metal.) Maintaining a seat seal against the valve body (therecessed surface 34, for example) may be useful in applications in whichflow capacity is purposely controlled to a value that is less thanmaximum flow capacity (for example, using a flow restriction device withthe valve seat 40 as is known). If the valve seat 40 were able to liftoff the recessed surface 34 when the valve is open, then fluid flowcould bypass the restriction. For valves that will operate under fullflow, the seat seal may not be a significant consideration when thevalve is in an open position.

A way to understand the nature of the flex of the web 54 is to think ofit in terms of a spring rate. By thinning the web 54 or removingmaterial that allows it to have more displacement at a lower load theseat carrier 44 can exhibit some “springiness”. Traditional designs arebulkier or thicker and as a result too stiff. At approximately 100 lbsof resistance force that the valve seat 40 can sustain a traditionalstiff non-flexible web will displace less than 0.001″ of flex whichdisplacement is not enough to accommodate thermal expansion mismatch.The flexibility of the web 54 may be determined by a number of factorsand variables, including but not limited to one or more of: the materialof the web, the thinness of the web, geometric and dimensional featuresthat may be used to provide flex, and so on.

In accordance with the teachings herein, in an embodiment, the web 54may be designed to exhibit a Belleville-type spring action from the webthat induces a delivered load to the valve seat 40 of betweenapproximately 50 and 100 lbs at a deflection of approximately 0.005″.This example equates to an effective spring rate of about 20,000 lbs perinch. The spring rate selected will depend on the particular valvedesign and operational needs, but for many valves the effective springrate of the seat carrier 44—relative to its central displacement alongthe axis X from a central load (e.g. where the web 54 contacts the valveseat flange 62) and fixed periphery—may be under 100,000 lbs per inchand more preferably under 80,000 lbs per inch. The spring rate considersall geometric and material variables that can be leveraged to produce adesired flex.

The seat carrier outer rim 46 preferably has a diameter such that theseat carrier 44 is closely received in the valve cavity 32. This allowsthe seat carrier 44 to self-align so that the central flow passage 60 ofthe valve seat 40 is coaxially aligned with the first port 36.

As noted above, the diaphragm 26 may be welded or otherwise secured tothe seat carrier 44 to form a fluid tight seal. With the valve seat 40installed and retained with the seat carrier 44, the combined diaphragm26, seat carrier 44 and valve seat 40 form the valve assembly 42 thatcan be easily replaced as a unified subassembly or cartridge formaintenance and repair of the valve 12.

At this point it should be noted that the valve assembly 42 is anembodiment of what is in effect a unitary subassembly or cartridge thatprovides a replaceable and easily installed self-contained valvemechanism and flow cavity for a diaphragm valve. The assembly 42provides a valve mechanism in the form of the diaphragm 26, a valveclosure mechanism in the form of the valve seat 40, and a fluid flowcavity that is sealed on one side of the seat carrier 44 by the weldeddiaphragm 26 and on an opposite side of the seat carrier by the valvebody 30 in the form of the recessed surface 34 when the valve assembly42 is fully seated and clamped into the valve body (as described below).The assembly 42 may be dimensioned so as to sealingly contain the fluidflow path between the first port 36 and the second port 38 afterassembly. This provides a simple and easy structure by which the commonwear items of the diaphragm and the valve seat can be easily replaced,especially as a field replacement or repair operation. Unlikeconventional diaphragm valves having discrete diaphragm and valve seatinstallation, the present inventions provide a unitary structure suchthat the valve seat and diaphragm are properly aligned at the time ofassembly of the cartridge, for example at the manufacturing site. Thisremoves the opportunity for misalignment of the valve seat or thediaphragm that could otherwise occur in the conventional designs duringreplacement of discrete parts, particularly in the field, due to theirseparate installation.

In order to securely mount the seat assembly 42 in the valve cavity 32,in an embodiment an annular nut 78 or other suitable retainer includesouter threads 80 that provide a threaded connection with internalthreads 82 of the valve body 30. The nut 78 may be tightened down nearthe periphery of the valve assembly 42. This compresses the firstsurface 48 of the outer rim 46 against the recessed surface 34 of thevalve body to form the body seal noted hereinabove. As best illustratedin FIG. 3, the nut 78 includes a bead 84 that is dimensioned to contactthe diaphragm non-wetted surface 24 in the area marked 86 inboard of theperipheral weld W. The nut 78 applies a compressive load against thediaphragm 26 which is sandwiched between the bead 84 and the secondsurface 50 of the outer rim 46 of the seat carrier 44 when the nut 78 istightened down into the valve cavity 32. This load is applied preferablyinboard of the weld W and thus may be used to isolate the weld W fromstresses that occur during flexing and movement of the diaphragm 26 whenthe valve is open and closed. Because the nut bead 84 applies a load onthe valve assembly 42 to both clamp the diaphragm and to create the bodyseal, it is preferred that the location of the bead 84 be selected sothat it is inboard of the weld W but will prevent or reduce distortionof the seat carrier 44 when the nut 78 is tightened into the valve body30. Because a compressive load is used to form the body seal, the valveassembly as a unit or cartridge can be easily removed from the diaphragmvalve 12 after the nut 78 is removed.

The nut 78 may also be provided with inner threads 88 that mate withthreads 90 of the actuator 14 in order to install the actuator 14 on thevalve body 30.

With reference to FIG. 4, the seat carrier 44 may include additionalflow passages 92 formed in the web 54. These flow passages 92 preferablyare evenly distributed about the central opening 56. In order for fluidto flow between the first port 36 and the second port 38, the fluid willpass through some or all of the additional flow passages 92. Theadditional flow passages 92 therefore help provide a higher flowcapacity for the valve 12. Preferably the additional flow passages 92are large enough so that they are separated from each other by lands 94that each have a dimension 96 between adjacent pairs of flow passages92—in the portion of each land 94 that may overlay the second port 38depending on the angular position of the web 54 when the assembly 42 isinstalled into the diaphragm valve—that is smaller than the diameter ofthe second port 38. Preferably, the dimension 96 will be less than halfthe diameter of the second port 38 and more preferably may be less than⅕ the diameter of the second port 38. This allows the seat assembly 42to be installed in any random radial or angular orientation regardlessof whether a land 94 could overlay the second port 38. Because each land94 preferably has a dimension 96 that is smaller than the second port 38diameter, an overlaying land 94 will not adversely reduce fluid flowcapacity of the valve 12. The use of smaller lands 94 including at thedimension 96 facilitates using larger flow passages 92 which increasesthe flow capacity of the valve assembly 42 and hence the diaphragm valve12.

To further provide higher flow capacity, the seat carrier 44 may bedimensioned such that when installed into the valve cavity 32 there is astandoff or gap 98 between the lower surface 74 of the web 54 and therecessed surface 34 of the valve body. This gap 98 may be provided in anembodiment by positioning the web 54 above the axial midpoint of theouter rim 46 (see FIG. 2). This gap 98 preferably is made large enoughto provide higher flow rates of the fluid passing between the first port36 and the second port 38 through the additional flow passages 92 whenthe valve is open. The web 54 presents a surface area in between theflow passages 92 around which fluid must flow to the second port 38through the flow passages 92. In order to increase flow capacity, it ispreferred that the flow area, as defined by the height of the gap 98times the radial dimension or width of the lands 94 (the width beingdefined along an axis perpendicular to the line 96 in FIG. 4) beapproximately the same as the flow area of the second port 38 orgreater. The gap 98 also helps compensate should a land 94 overlay thesecond port 38 by providing additional flow space between the secondport 38 and the additional flow passages 92. By way of example, the gap98 may be sized so as to provide a flow area that is defined by thespace between the seat carrier web 54 and the valve body recessedsurface 34 (when viewed in cross-section), that is comparable or largerthan the first port 36 square area. As another alternative, the gap 98may be made larger by extending the axial length of the lower portion ofthe outer rim 46 that extends below the web 54. As another alternative,a groove, trench or recess may be machined into the recessed surface ortrepan 34. A flat rim or shoulder could then be used for the seatcarrier first surface 48 to bear against and provide the body seal.

For example, suppose the second port has a flow area of 0.018 in². Thenpreferably the flow area between the web 54 (more specifically the lowersurface 74 of the web 54) and the valve body recessed surface 34 shouldbe approximately the same or larger—for example, the flow area may berealized with a width of 0.18 inches and a gap 98 may be 0.1 inches sothat 0.18 in times 0.1 inches equals a flow area of 0.018 in².

With reference to FIG. 5, the diaphragm valve and actuator assembly 10(shown in exploded cross-section) may be installed on a manifold 100(which may be the manifold 16 in FIG. 1). In this example, the manifold100 may be side ported with first and second manifold flow passages 102,104 for fluid flow into and out of the first port 36 and the second port38 of the valve 12. The exemplary manifold 16 (FIG. 1) and the manifold100 of FIG. 5 incorporate surface mount technology in that the firstport 36 and the second port 38 of the valve 12 are coplanar in the valvecavity 32. Other porting configurations and valve body configurationsmay be used as needed for particular applications.

In accordance with another inventive concept, methods of installing andreplacing a diaphragm or valve seat or both in a diaphragm valve areprovided. In an embodiment, a method for installing a diaphragm or valveseat or both may include the steps of: 1) forming a valve assemblyhaving a valve seat, a seat carrier and a diaphragm by attaching thediaphragm to the seat carrier by welding a periphery of the diaphragm toan outer rim of the seat carrier; 2) retaining the valve seat with theseat carrier and the welded diaphragm; and 3) installing the valveassembly into a valve body.

In another embodiment, a method for replacing a diaphragm or valve seator both may include the steps of: 1) forming a replacement valveassembly comprising a valve seat, a seat carrier and a diaphragm byattaching the diaphragm to the seat carrier by welding a periphery ofthe diaphragm to an outer rim of the seat carrier, 2) retaining thevalve seat with the seat carrier and the welded diaphragm, 3) removingfrom a valve body a prior valve assembly, and 4) replacing the priorvalve assembly with the replacement valve assembly. This method mayoptionally be combined with the method for installing a diaphragm, valveseat or both into the valve body, wherein the installed valve assemblyis subsequently replaced using the method for replacing a diaphragm orvalve seat or both as just described.

For both the method of installation and the method of replacing, eachmethod may include the step of applying a load on the valve assembly inthe valve body to form a body seal by compressing a surface of the seatcarrier against a surface of the valve body.

The inventive aspects and concepts have been described with reference tothe exemplary embodiments. Modification and alterations will occur toothers upon a reading and understanding of this specification. It isintended to include all such modifications and alterations insofar asthey come within the scope of the appended claims or the equivalentsthereof.

I claim:
 1. A diaphragm valve, comprising: a valve body comprising avalve cavity, a first port and a second port, said first port and saidsecond port being open to said valve cavity, a valve assembly disposedto seal said valve cavity, said valve assembly comprising a valve seat,a seat carrier and a diaphragm, said valve seat being retained with saidseat carrier and said diaphragm being attached to a first side of saidseat carrier by a weld, said valve seat being disposed to surround saidfirst port, said valve seat comprising a flow passage in fluidcommunication with said first port.
 2. The diaphragm valve of claim 1wherein said diaphragm comprises a domed circular disk and is weldedabout a periphery of said diaphragm to said seat carrier.
 3. Thediaphragm valve of claim 1 wherein said seat carrier comprises anannular body having an outer rim and a web that extends radially inwardfrom said outer rim to a central opening, said central opening beingaligned with said first port when said valve assembly is installed insaid valve body.
 4. The diaphragm valve of claim 3 wherein said webcomprises a plurality of flow passages separated by lands about saidcentral opening.
 5. The diaphragm valve of claim 3 wherein said valveseat is retained with said seat carrier by an interference fit between acircumferential wall of said valve seat and a wall of said web thatdefines said central opening.
 6. The diaphragm valve of claim 5 whereinsaid web is flexible so that said web biases a surface of said valveseat that faces away from said diaphragm into contact with a sealsurface that surrounds said first port.
 7. The diaphragm valve of claim4 wherein each said land between adjacent pairs of said flow passageshas a surface area that is less than a cross-sectional area of saidsecond port so as to reduce obstruction of flow when said land overlayssaid second port.
 8. The diaphragm valve of claim 1 wherein saiddiaphragm comprises a domed circular disk that is attached to said seatcarrier by a weld about a periphery of said diaphragm, said diaphragmvalve further comprising a threaded member that applies a compressiveload to said diaphragm against said seat retainer and radially inward ofsaid weld.
 9. The diaphragm valve of claim 1 wherein said second port isprovided in a surface of said valve body that defines said valve cavity,said seat carrier comprises an annular body having an outer rim and aweb that extends radially inward from said outer rim to a centralopening, said web being disposed to provide a gap between a lowersurface of said web and said surface of said valve body.
 10. Thediaphragm valve of claim 1 in combination with a valve actuator that isoperable to move a surface of said diaphragm into and out of contactwith said valve seat.
 11. The diaphragm valve of claim 1 wherein saiddiaphragm comprises stainless steel, said seat carrier comprisesstainless steel, and said valve seat comprises a polymer or plastic. 12.A valve assembly comprising a valve seat, a seat carrier and adiaphragm, said valve seat being retained with said seat carrier andsaid diaphragm being attached to a first side of said seat carrier by aweld.
 13. The valve assembly of claim 12 wherein said seat carriercomprises an annular body having an outer rim and a web that extendsradially inward from said outer rim to a central opening in said web.14. The valve assembly of claim 13 wherein said web comprises aplurality of flow passages separated by lands about said centralopening.
 15. The valve assembly of claim 13 wherein said valve seat isretained with said seat carrier by an interference fit between acircumferential wall of said valve seat and a wall of said seat carrierthat defines said central opening.
 16. The valve assembly of claim 15wherein said web is flexible.
 17. The valve assembly of claim 14 whereineach said land between adjacent pairs of said flow passages has asurface area that is less than a cross-sectional area of each flowpassage.
 18. The valve assembly of claim 12 wherein said diaphragmcomprises a domed circular disk and is welded about a periphery of saiddiaphragm to said seat carrier.
 19. The valve assembly of claim 18wherein said diaphragm comprises stainless steel, said seat carriercomprises stainless steel, and said valve seat comprises a polymer orplastic.
 20. The diaphragm valve of claim 1 wherein said diaphragm isoperable to open and close flow between said first port and said secondport, said diaphragm being moveable into contact with said valve seat toclose flow between said first port and said second port.
 21. Thediaphragm valve of claim 1 wherein said seat carrier has a spring rateof less than 100,000 lbs/in.
 22. The diaphragm valve of claim 21 whereinsaid seat carrier more preferably has a spring rate of less than 80,000lbs/in.
 23. The diaphragm valve of claim 22 wherein said seat carriermore preferably has a spring rate of approximately than 20,000 lbs/in.24. The valve assembly of claim 12 wherein said seat carrier has aspring rate of less than 100,000 lbs/in.
 25. The valve assembly of claim24 wherein said seat carrier more preferably has a spring rate of lessthan 80,000 lbs/in.
 26. The valve assembly of claim 25 wherein said seatcarrier more preferably has a spring rate of approximately than 20,000lbs/in.
 27. The diaphragm valve of claim 9 wherein said gap presents aflow area that is approximately the same or greater than the flow areaof said second port.
 28. The diaphragm valve of claim 27 wherein saidweb is generally planar and has a spring rate of less than 100,000lbs/in.
 29. A method of replacing a diaphragm or valve seat or both in adiaphragm valve, comprising: forming a replacement valve assemblycomprising a valve seat, a seat carrier and a diaphragm by attaching thediaphragm to the seat carrier by welding a periphery of the diaphragm toan outer rim of the seat carrier, retaining the valve seat with the seatcarrier and the welded diaphragm, removing from a valve body a priorused valve assembly and replacing the prior used valve assembly with thereplacement valve assembly.
 30. The method of claim 29 comprising thestep of applying a load on the valve assembly in the valve body to forma body seal by compressing a surface of the seat carrier against asurface of the valve body.
 31. A method of installing a diaphragm orvalve seat or both into a diaphragm valve, comprising: forming a valveassembly comprising a valve seat, a seat carrier and a diaphragm byattaching the diaphragm to the seat carrier by welding a periphery ofthe diaphragm to an outer rim of the seat carrier, retaining the valveseat with the seat carrier and the welded diaphragm, installing thevalve assembly into a valve body.
 32. The method of claim 31 comprisingthe step of applying a load on the valve assembly in the valve body toform a body seal by compressing a surface of the seat carrier against asurface of the valve body.
 33. A diaphragm valve, comprising: a valvebody comprising a valve cavity, a first port and a second port, saidfirst port and said second port being open to said valve cavity, aremovable valve assembly disposed to seal said valve cavity, said valveassembly comprising a valve seat, a seat carrier and a diaphragm, saidvalve seat being retained with said seat carrier and said diaphragmbeing attached to a first side of said seat carrier by a weld, saidvalve assembly providing a sealed flow chamber that is in fluidcommunication with said first port and said second port.
 34. Thediaphragm valve of claim 33 wherein said removable valve assemblycomprises a surface on a second side of said seat carrier that iscompressed against a surface of said valve body to form a body seal tocontain fluid within said sealed flow chamber.